Download A Guide to Hands-on MEMS Design and Prototyping by Kubby PDF

By Kubby

no matter if you're a scholar taking an introductory MEMS direction or a training engineer who must wake up to hurry fast on MEMS layout, this useful consultant presents the hands-on adventure had to layout, fabricate and try MEMS units. you'll methods to use foundry multi-project fabrication approaches for reasonably cheap MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a number of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, in addition to workouts and layout demanding situations on the finish of each bankruptcy. suggestions to the layout problem difficulties are supplied online.

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By Kubby

no matter if you're a scholar taking an introductory MEMS direction or a training engineer who must wake up to hurry fast on MEMS layout, this useful consultant presents the hands-on adventure had to layout, fabricate and try MEMS units. you'll methods to use foundry multi-project fabrication approaches for reasonably cheap MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a number of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, in addition to workouts and layout demanding situations on the finish of each bankruptcy. suggestions to the layout problem difficulties are supplied online.

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